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作者机构:Department of Electronic Engineering Southern Taiwan University Tainan Taiwan R.O.C. Department of Electronics Engineering and Computer Science Tung-Fang Design University Kaohsiung Taiwan R.O.C. Department of Mathematics and Physics Chinese Air Force Academy Kangshan Kaohsiung Taiwan R.O.C.
出 版 物:《International Journal of Modern Physics: Conference Series》
年 卷 期:2012年第ijmpcs卷第6期
页 面:91-97页
主 题:Sol-gel process CBT thin film ferroelectric ITO/glass Leakage current density
摘 要:In this study, ferroelectric CaBi 4 Ti 4 O 15 (CBT) thin films prepared by sol-gel method and deposited on ITO/glass substrates for applications in system-on-panel (SOP) devices were fabricated and investigated. The electrical and physical characteristics of as-deposited and annealed CBT thin films for metal-ferroelectric-metal (MFM) structures was discussed and investigated. In addition, the ferroelectric properties in annealed CBT thin films on ITO/glass substrate showed and exhibited clear polarization versus electrical field curves. From p - E curves, the 2 P r value and coercive field of annealed CBT thin films were calculated to be 10μC/cm 2 and 180 kV/cm, respectively. Finally, the maximum capacitance, leakage current density, and transmittance within the ultraviolet-visible (UV–vis) spectrum were also investigated and discussed.