Lattice Parameter Determination of Textured Co 81−x Cr 15 Pt x Ta 4 Thin Films

作     者：B. Lu S. D. Harkness W. A. Lewis D. E. Laughlin D. N. Lambeth 

作者机构：Data Storage System Center Carnegie Mellon University Pittsburgh USA Intevac Vacuum Systems Division Santa Clara USA 

出 版 物：《MRS Online Proceedings Library》 

年 卷 期：2011年第562卷第1期

页      面：117-122页

摘      要：The thin films Co81−xCr15PtxTa4 with (0002) crystallographic texture have been sputter deposited with and without substrate bias. The lattice parameter of the thin films has been determined by a combination of x-ray diffraction and electron diffraction techniques. The resolution of the electron diffraction was enhanced by a digital imaging technique. The variation rate of the a lattice parameter with Pt content is consistent with Vegard’s law. The change in the c lattice parameter is much greater than what is expected from Vegard’s law.