Microcantilever-integrated photonic circuits for broadband laser beam scanning

作     者：Azadeh, Saeed Sharif Mak, Jason C.C. Chen, Hong Luo, Xianshu Chen, Fu-Der Chua, Hongyao Weiss, Frank Alexiev, Christopher Stalmashonak, Andrei Jung, Youngho Straguzzi, John N. Lo, Guo-Qiang Sacher, Wesley D. Poon, Joyce K.S. 

作者机构：Max Planck Institute of Microstructure Physics Weinberg 2 Halle06120 Germany University of Toronto Department of Electrical and Computer Engineering 10 King's College Road Ontario TorontoM5S 3G4 Canada Advanced Micro Foundry Pte. Ltd. 11 Science Park Road Singapore Science Park II 117685 Singapore 

出 版 物：《arXiv》 (arXiv)

年 卷 期：2022年

核心收录：

主　　题：Silicon nitride 

摘      要：Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. An outstanding challenge remains to simultaneously achieve a compact footprint, broad wavelength operation, and low power consumption. Here, we introduce a laser beam scanner that meets these requirements. Using microcantilevers embedded with silicon nitride nanophotonic circuitry, we demonstrate broadband, one- and two-dimensional steering of light with wavelengths from 410 nm to 700 nm. The microcantilevers have ultracompact ~0.1 mm2 areas, consume ~31 to 46 mW of power, are simple to control, and emit a single light beam. The microcantilevers are monolithically integrated in an active photonic platform on 200-mm silicon wafers. The microcantilever-integrated photonic circuits miniaturize and simplify light projectors to enable versatile, power-efficient, and broadband laser scanner microchips. © 2022, CC BY-NC-ND.