A Highly Sensitive Triboelectric Vibration Sensor for Machinery Condition Monitoring

作     者：Zhao, Hongfa Shu, Mingrui Ai, Zihao Lou, Zirui Sou, Kit Wa Lu, Chengyue Jin, Yuchao Wang, Zihan Wang, Jiyu Wu, Changsheng Cao, Yidan Xu, Xiaomin Ding, Wenbo 

作者机构：Tsinghua Univ Shenzhen Int Grad Sch Tsinghua Berkeley Shenzhen Inst Shenzhen 518055 Peoples R China Tsinghua Univ Shenzhen Int Grad Sch Shenzhen Key Lab Marine IntelliSense & Computat Southern Marine Sci & Engn Guangdong Lab Guangzho Shenzhen 518055 Peoples R China Natl Univ Singapore Dept Mat Sci & Engn 9 Engn Dr 1 Singapore 117575 Singapore Tsinghua Univ Tsinghua Shenzhen Int Grad Sch Inst Mat Res Shenzhen Geim Graphene Ctr Shenzhen 518055 Peoples R China RISC V Int Open Source Lab Shenzhen 518055 Peoples R China 

出 版 物：《ADVANCED ENERGY MATERIALS》 (激光物理学评论)

年 卷 期：2022年第12卷第37期

页      面：2201132-2201132页

核心收录：

学科分类：0820[工学-石油与天然气工程] 070207[理学-光学] 07[理学] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：National Natural Science Foundation of China [62104125, 52003141, 52007019] Guangdong Basic and Applied Basic Research Foundation [2020A1515110887] Shenzhen Stable Supporting Program [WDZC20200818092033001] Tsinghua Shenzhen International Graduate School [HW2021, QD2021013C, QD2021006N, JC2021007] Institute for Guo Qiang of Tsinghua University [2020GQG1004] 

主　　题：machinery condition monitoring self-powered sensors triboelectric nanogenerators vibration 

摘      要：Vibration sensors are involved extensively in a variety of applications. Especially in the era of the Internet of Things, developing self-powered vibration sensors has become a very meaningful yet challenging problem. This study investigates a highly sensitive self-powered vibration sensor based on the triboelectric nanogenerator (VS-TENG) for machinery condition monitoring. By introducing a stacked structure comprising foamed aluminum, and a fluorinated ethylene propylene film with gold-plated electrode protected by two indium tin oxid layers, The VS-TENG can detect the vibrations with frequencies ranging from 1 to 2000 Hz and can detect vibrations of low amplitude (approximately sub-mu m, by calculation). The output performance and characteristics of the TENG under various vibration frequencies, accelerations, and amplitudes are analyzed systematically. The VS-TENG is successfully used to monitor the operating conditions of mechanical gear systems, reaching a recognition accuracy of 99.78%. Furthermore, it can also be utilized for vibration detection in other areas such as the air compressor, heat gun, hollow tile recognition, etc., which means a solid progress toward the practical applications of TENGs in self-powered vibration detection.