Modeling of Thermogasdynamics and Thermal Processes of Volatile Halides of Elements of III, IV and VI Groups in Thermal Plasma of RF-IC Discharge at Atmospheric Pressure

作     者：Shabarova, L., V Kornev, R. A. Ermakov, A. A. Shkrunin, V. E. Shishkin, A., I Belov, A. A. Kalyasov, P. S. 

作者机构：GG Devyatykh Inst Chem High Pur Subst RAS 49 Tropinin Str Nizhnii Novgorod 603951 Russia RE Alekseev Nizhny Novgorod State Tech Univ 24 Minin Str Nizhnii Novgorod 603950 Russia Natl Res Lobachevsky State Univ Nizhny Novgorod 23 Prospekt Gagarina Nizhnii Novgorod 603022 Russia 

出 版 物：《PLASMA CHEMISTRY AND PLASMA PROCESSING》 (等离子体化学与等离子体处理)

年 卷 期：2022年第42卷第6期

页      面：1381-1403页

核心收录：

学科分类：081704[工学-应用化学] 07[理学] 0817[工学-化学工程与技术] 070304[理学-物理化学(含∶化学物理)] 08[工学] 0703[理学-化学] 0702[理学-物理学] 

基　　金：RSF [20-13-00035] 

主　　题：Computational hydrodynamics Thermodynamics Hydrogen recovery Volatile halides Isotopes 

摘      要：A mathematical model has been proposed and verified, based on the combination of thermodynamic calculations of equilibrium plasma and CFD-modeling of the plasma-chemical reactor for hydrogen recovery of volatile halides. An experimental study of the hydrogen reduction processes of BCl3 and SiCl4 was carried out under conditions of RF-IC (RF inductively coupled) discharge at atmospheric pressure. Based on the experimental results, the developed mathematical model was validated. A series of numerical experiments on parametric study of gas dynamics of high-frequency plasmatron with vortex stabilization of flow for various hydrogen concentrations in argon-hydrogen plasma-forming mixture was carried out. Thermodynamic calculations and CFD modeling were made for input into the reaction chamber of chemically active gas mixtures (BCl3 + H-2), (BF3 + H-2), (SiCl4 + H-2), (SiF4 + H-2), (MoF6 + H-2), (WF6 + H-2), (BCl3 + CH4 + H-2), (BF3 + CH4 + H-2), (SiF4 + CH4 + H-2), (MoF6 + CH4 + H-2) and (WF6 + CH4 + H-2). The values for the predictive efficiency and the degree of conversion of target products were obtained.