High performance electro-optic modulator based on thin-film lithium niobate

作     者：LIU Leshu LIU Ning ZHANG Jianfa ZHU Zhihong LIU Ken 

作者机构：College of Advanced Interdisciplinary Studies&Hunan Provincial Key Laboratory of Novel Nano-Optoelectronic Information Materials and DevicesNational University of Defense TechnologyChangsha410073China 

出 版 物：《Optoelectronics Letters》 (光电子快报（英文版）)

年 卷 期：2022年第18卷第10期

页      面：583-587页

核心收录：

学科分类：081702[工学-化学工艺] 080902[工学-电路与系统] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0817[工学-化学工程与技术] 0803[工学-光学工程] 

基　　金：supported by the Science and Technology Planning Project of Hunan Province(Nos.2018JJ1033 and 2017RS3039) 

主　　题：modulator waveguide lithium 

摘      要：Electro-optic(EO) modulator plays a very critical role in the optical communication systems. Here, we report a stimulated thin-film lithium niobate(LN) modulator with a half-wave voltage-length product of 1.8 V·cm, which can successfully achieve modulation and demodulation of a 1 GHz sinusoidal signal with an amplitude of 5 V in experiment. The optical loss caused by metal electrodes is reduced by optimizing the waveguide structure and depositing silica onto the waveguide, and group-velocity matching and characteristic impedance matching are achieved by optimizing the buffer silica layer and the electrode structure for larger bandwidth, which simultaneously improves the modulation efficiency and bandwidth performance. Our work demonstrated here paves a foundation for integrated photonics.