A Novel Fast Servo Tool Device with Double Piezoelectric Driving

作     者：Liu, Junfeng Luo, Tiancong Liu, Kexian Lai, Tao Zhao, Yuqian Wang, Linfeng 

作者机构：Natl Univ Def Technol Coll Intelligence Sci & Technol Lab Sci & Technol Integrated Logist Support Changsha 410073 Peoples R China Beijing Zhenxing Inst Metrol & Measurement Beijing 100074 Peoples R China 

出 版 物：《MICROMACHINES》 (微型机械)

年 卷 期：2023年第14卷第1期

页      面：85-85页

核心收录：

学科分类：08[工学] 0804[工学-仪器科学与技术] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0802[工学-机械工程] 0702[理学-物理学] 

基　　金：Natural National Science Foundation of China (NSFC) [51991372/51991371] 

主　　题：FTS double piezoelectric driving (DPD) hysteresis model microstructure processing 

摘      要：The fast tool servo (FTS) technology has unique advantages in the machining of complex surfaces such as special-shaped targets and free-form surfaces. In view of the shortcomings in the performance of the existing FTS device, this paper puts forward a novel FTS which uses two piezoelectric ceramics instead of flexure hinges to provide restoring force. Firstly, the feasibility of the double-drive principle is verified theoretically, and the corresponding mechanism is optimized accordingly. Then, the system control hysteresis model is established and identified, and the appropriate control strategy is designed. Finally, the performances of the proposed FTS device are tested, and a typical microstructure is machined based on the device and ultra-precision lathe. The results indicate that the proposed device effectively improves the performance of the FTS system, which is useful for the processing of microstructures and free-form surfaces.