ZnO Modified High Aspect Ratio Carbon Electrodes for Hydrogen Sensing Applications

作     者：Umesh Singh Hyun Ae Lee Young-Chul Byun Amit Kumar Sudipta Seal Hyoungsub Kim Hyoung J. Cho 

作者机构：Advanced Materials Processing Analysis Centre (AMPAC) and Department of Mechanical Materials & Aerospace Engineering University of Central Florida Orlando USA School of Advanced Materials Science and Engineering (WCU Program) Sungkyunkwan University Suwon Korea 

出 版 物：《Procedia Engineering》 

年 卷 期：2011年第25卷

页      面：1669-1672页

学科分类：12[管理学] 1201[管理学-管理科学与工程(可授管理学、工学学位)] 08[工学] 

主　　题：Hydrogen Gas Sensors MEMS Carbon Atomic Layer Deposition ZnO 

摘      要：Design, fabrication, and testing results of a hydrogen gas sensor based on a surface modified high density and high aspect ratio 3-D carbon post microarray are described in this paper. After the conversion of photoresist patterns into carbon electrodes, the increased surface was conformally coated with a metal oxide semiconductor film by atomic layer deposition (ALD). A maximum sensitivity as high as 100 (R air / R hydrogen ) has been observed in the fabricated sensor even in the presence of moisture at low temperature. A fast initial response (90% resistance drop in 30 sec at 3000 ppm hydrogen) of the sensor could be utilized for early leak detection. The methodology of surface modification as well as the test result shows good promise for various chemical sensing devices based on the proposed strategy.