Low-loss tantalum pentoxide photonics with a CMOS-compatible process

作     者：Geng, Zhaoting Cheng, Weiren Yan, Zhiwei Yi, Qiyuan Liu, Zhenyu You, Mingjian Yu, Xiaolun Wu, Pengzhuo Ding, Ning Tang, Xingyu Wang, Min Shen, Li Zhao, Qiancheng 

作者机构：Southern Univ Sci & Technol Engn Res Ctr Integrated Circuits Next Generat Comm Sch Microelect MOE Shenzhen 518000 Guangdong Peoples R China Huazhong Univ Sci & Technol Wuhan Natl Lab Optoelect Wuhan 430074 Peoples R China Huazhong Univ Sci & Technol Sch Opt & Elect Informat Wuhan 430074 Peoples R China 

出 版 物：《OPTICS EXPRESS》 (Opt. Express)

年 卷 期：2024年第32卷第7期

页      面：12291-12302页

核心收录：

学科分类：070207[理学-光学] 07[理学] 08[工学] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：National Natural Science Foundation of China Guangdong Provincial Quantum Science Strategic Initiative [GDZX2304009] Basic and Applied Basic Research Foundation of Guangdong Province [2021B1515120074, 2023A1515012141] Wuhan National Laboratory for Optoelectronics [2021WNLOKF001] Shenzhen NSQKJJ [K23799109] State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Jiao Tong University, China [2024GZKF003] 

主　　题：Integrated photonics Materials processing Optical properties Q factor Ring resonators Waveguides 

摘      要：We report a Ta2O5 photonic platform with a propagation loss of 0.49 dB/cm at 1550 nm, of 0.86 dB/cm at 780 nm, and of 3.76 dB/cm at 2000 nm. The thermal bistability measurement is conducted in the entire C -band for the first time to reveal the absorption loss of Ta2O5 waveguides, offering guidelines for further reduction of the waveguide loss. We also characterize the Ta2O5 waveguide temperature response, which shows favorable thermal stability. The fabrication process temperature is below 350 degrees C, which is friendly to integration with active optoelectronic components.