High Permeability in Broadband of Co-sputtered [Fe-Fe_(20)Ni_(80)/Cr]_(n) Multilayer Films

作     者：罗创钰 LIU Xing 王峰 李维 LUO Chuangyu;LIU Xing;WANG Feng;LI Wei

作者机构：State Key Laboratory of Advanced Technology for Materials Synthesis and ProcessingWuhan University of TechnologyWuhan 430070China College of Materials and Chemical EngineeringHezhou UniversityHezhou 542899China 

出 版 物：《Journal of Wuhan University of Technology(Materials Science)》 (武汉理工大学学报（材料科学英文版）)

年 卷 期：2024年第39卷第2期

页      面：410-416页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：Funded by the Young Top-notch Talent Cultivation Program of Hubei Province the Fundamental Research Funds for the Central Universities(WUT:2021IVA116 and WUT:2021CG015) 

主　　题：magnetron sputtering multiple magnetic resonance high permeability electromagnetic noise suppression 

摘      要：To achieve high microwave permeability in wide-band for the micron-thick magnetic films,[Fe-Fe_(20)Ni_(80)/Cr]_(n) multilayer structure was proposed by co-sputtering Fe and FeNi to form the magnetic layers and Cr to form the *** multilayer structure contributes to the high permeability by reducing the coercivity and diminishing out-of-plane *** maximum imaginary permeability of[Fe-Fe_(20)Ni_(80)/Cr]_(n) multilayer film reaches a large value of 800 at 0.52 GHz even though its overall thickness exceeds 1μ***,the magnetic resonance frequency of the multilayer film can be modulated from 0.52 to 1.35 GHz by adjusting the sputtering power of Fe from 0 to 86 W,and its bandwidth for μ’’200(Δf) is as large as 2.0 *** desirable broad Δf of magnetic permeability,which can be well fitted by the Landau-Lifshitz-Gilbert equations,is due to dual magnetic resonances originated from double magnetic phases of Fe and FeNi that are of different saturation *** micron-thick multilayer films with high permeability in extended waveband are promising candidate for electromagnetic noise suppression application.