High-Sensitivity Narrow‑Frequency T-Shaped Cantilever Fabry-Perot Acoustic Sensor for Photoacoustic Spectroscopy

作     者：Wang, Jilong Wang, Qiaoyun Yan, Chongyue Xu, Shunyuan Zou, Xin Wu, Qiang Ng, Wai Pang Fu, Yong-Qing Binns, Richard 

作者机构：College of Information Science and Engineering Northeastern University at Qinhuangdao Liaoning Province Shenyang110819 China Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology Qinhuangdao066004 China Faculty of Engineering & Environment Northumbria University Newcastle upon TyneNE1 8ST United Kingdom 

出 版 物：《SSRN》 

年 卷 期：2024年

核心收录：

主　　题：Photoacoustic spectroscopy 

摘      要：The acoustic pressure detection is an important part in the PAS system. In this paper, an ultrahigh sensitivity Fabry-Perot acoustic sensor with a T-shaped cantilever was proposed. Simulation results showed that the sensitivity of such T-shaped cantilever was 1.5 times higher than that based on a rectangular cantilever, and the resonance frequency of T-shaped cantilever were able to modulate from 800 Hz to 1500 Hz by adjusting the multi-parameter characteristics. Experimental sensing results showed that the resonance frequency of T-shaped Fabry-Perot acoustic sensor was 1080 Hz, yielding a high sensitivity of 1.428 μm/Pa, with a signal-to-noise ratio (SNR) of 84.8 dB and a detectable pressure limit of 1.9 μPa/Hz1/2@1 kHz. We successfully used such acoustic sensor to measure acetylene (C2H2) concentration in the PAS. The sensitivity of PAS for C2H2 gas was 3.22 pm/ppm with a concentration range of 50 ppm ~100 ppm, and the minimum detection limit was 24.91ppb. © 2024, The Authors. All rights reserved.