An automatic Q-factor matching method for eliminating 77%of the ZRO of a MEMS vibratory gyroscope in rate mode

作     者：Jingbo Ren Tong Zhou Yi Zhou Yixuan Li Yan Su 

作者机构：School of Mechanical EngineeringNanjing University of Science and TechnologyNanjing 210000China 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2024年第10卷第3期

页      面：35-48页

核心收录：

学科分类：08[工学] 0825[工学-航空宇航科学与技术] 

基　　金：supported in part by the National Natural Science Foundation of China under Grants 61971466 and 62001223 in part by the Equipment Pre-Research Foundation of China under Grant 80917020506 

主　　题：matching mode method 

摘      要：Mismatching quality factors(Q-factors)is one of the main factors causing zero-rate output(ZRO)in degenerate(DE)Micro-Electro-Mechanical Systems(MEMS)vibratory *** eliminate the ZRO of the DE MEMS gyroscope,this study introduces a method for real-time identification and automatic matching of Q-factors in rate *** leveraging the vibration characteristics of the DE MEMS vibratory gyroscope in rate mode,dedicated online test methods are designed to determine the Q-factors for both the drive and sense modes,enabling online identification of the Q-factor ***,an automatic Q-factor matching system is designed utilizing the mechanical-thermal dissipation mechanism of the resistive *** effectiveness of this proposed method is validated through simulations and experiments conducted on a MEMS disk resonator gyroscope(DRG).The results show a measurement error within 4%for Q-factor identification,and automatic Q-factor matching effectively reduces the ZRO by 77%.Employing this automatic Q-factor matching method successfully reduces the ZRO that is caused by the mismatching of Q-factors in the MEMS DRG from 0.11°/s to 0.025°/s and improves the bias instability(BI)from 0.40°/s to 0.19°/s.