Microstructure, mechanical properties, and wear behaviors of CrSiN films on oxynitriding-treated Vanadis 60 high-speed steel by the direct current magnetron sputtering process

作     者：Huang, Kuo-Tsung Chang, Shih-Hsien Huang, Han-Fu Chen, Chien-Wei Yang, Chih-Hao 

作者机构：Department of Auto-Mechanics National Kangshan Agricultural Industrial Senior High School Kaohsiung82049 Taiwan Department of Materials and Mineral Resources Engineering National Taipei University of Technology Taipei10608 Taiwan Institute of Materials Science and Engineering National Taipei University of Technology Taipei10608 Taiwan Department of Mechanical Engineering National Pingtung University of Science and Technology Pingtung 91201 Taiwan China 

出 版 物：《Thin Solid Films》 (Thin Solid Films)

年 卷 期：2024年第801卷

核心收录：

学科分类：080602[工学-钢铁冶金] 0809[工学-电子科学与技术（可授工学、理学学位）] 0817[工学-化学工程与技术] 0806[工学-冶金工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：This research is supported by the ASSAB Steels Taiwan Co.  Ltd. and National Taipei University of Technology under Grant No. 211A052 . And the publication founds are subsidized by the National Taipei University of Technology under Grant No. 212A051 . The authors would like to express their appreciation for voestalpine High Performance Metals Pacific Pte Ltd. Furthermore  thanks to Prof. H.C. Lin and Mr. C.Y. Kao of Instrumentation Center  National Taiwan University for TEM experiments.This research is supported by the ASSAB Steels Taiwan Co. Ltd. and National Taipei University of Technology under grant no. 211A052. And the publication founds are subsidized by the National Taipei University of Technology under grant no. 212A051. The authors would like to express their appreciation for voestalpine High Performance Metals Pacific Pte Ltd. Furthermore  thanks to Prof. H.C. Lin and Mr. C.Y. Kao of Instrumentation Center  National Taiwan University for TEM experiments 

主　　题：Wear of materials 

摘      要：This study utilized the direct current magnetron sputtering technique within the physical vapor deposition process to apply a chrome silicon nitride (CrSiN) coating onto the oxynitrided surface of Vanadis 60 high-speed steel. The experimental parameters include various deposition bias voltages (0, -25, -50, -75, and -100 V), a gas flow rate of 45/30 (Ar/N2) sccm, a power of 100 W, a voltage of 400 V, a deposition time of 2.5 h, and a deposition temperature of 225 °C. The research results show that the substrate formed an oxynitriding layer with a thickness of about 30 μm, while the surface hardness increased to about 1300 HV0.05. When the coatings were deposited at a bias voltage of -100 V, the CrSiN coatings possessed the highest hardness (5.74 GPa) and elastic modulus (110.94 GPa), thus, it had the best wear resistance (specific wear rate was 1.19×10−5, and 7.29×10−5 mm3·m−1·N−1 under the loads of 1.5 N and 3 N), and good corrosion resistance (corrosion current was 3.28×10−5 A·cm−2, and polarization resistance was 793.18 Ω·cm2 in a 0.1 N H2SO4 solution). Furthermore, transmission electron microscopy observations confirm that the CrSiN coatings had a significant amorphous structure. © 2024 Elsevier B.V.