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Information limit of 15 picometers achieved with bright-field ptychography

作     者:Haozhi Sha Jizhe Cui Wenfeng Yang Rong Yu 

作者机构:School of Materials Science and Engineering Tsinghua University Beijing 100084 China MOE Key Laboratory of Advanced Materials Tsinghua University Beijing 100084 China State Key Laboratory of New Ceramics and Fine Processing Tsinghua University Beijing 100084 China 

出 版 物:《Physical Review B》 (Phys. Rev. B)

年 卷 期:2024年第110卷第6期

页      面:L060104页

核心收录:

基  金:National Natural Science Foundation of China, NSFC, (52388201) National Natural Science Foundation of China, NSFC 

主  题:Convergent beam electron diffraction Crystal structures Electron diffraction Electron microscopy Scanning transmission electron microscopy 

摘      要:It is generally assumed that a high spatial resolution of a microscope requires a large numerical aperture of the imaging lens or detector. In this study, the information limit of 15 pm is achieved in transmission electron microscopy using only the bright-field disk (small numerical aperture) via multislice ptychography. The results indicate that high-frequency information has been encoded in the bright-field disk due to the multiple scattering of electrons in the objects, making it possible to break the diffraction limit of imaging via bright-field ptychography.

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