Vibration disturbance compensation in in situ confocal microscopy

作     者：Liu, Jian Xu, Zhenlong Wang, Ziyi Liu, Chenguang 

作者机构：Harbin Inst Technol Sch Instrumentat Sci & Engn Harbin 150001 Peoples R China 

出 版 物：《OPTICS LETTERS》 (光学快报)

年 卷 期：2024年第49卷第19期

页      面：5567-5570页

核心收录：

学科分类：070207[理学-光学] 07[理学] 08[工学] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：National Key Research and Development Program of China [2021YFF0700400] 

主　　题：Bandpass filters Charge-coupled devices Image metrics Modulation transfer function Optical components Speckle patterns 

摘      要：In situ microscopic measurement, conducted within the natural environment of a material or device, offers precise observations directly at the sample location, mitigating potential damage or deformation during transport. However, the inherent vibration of microscopic measurement equipment can introduce blurring and distortion to images, compromising measurement accuracy. This study proposes employing an acceleration sensor to detect microprobe vibrations and subsequently calculates three-dimensional coordinate displacements to compensate for measurement discrepancies. This approach can diminish the adverse effects of vibration on measurement outcomes within the order of hundreds of nanometers. Experimental results demonstrated the efficacy of this method in mitigating vibration artifact stripes or irregularities with a displacement amplitude I = sinc2[a(z - b)] ranging from similar to 0.2 to 5.2 mu m and a frequency spanning similar to 7.9-18.8 Hz. Moreover, the lateral resolution of the probe attained 212 nm. Notably, the measurement error associated with the standard step height was decreased from 2.32 to 0.03 mu m. (c) 2024 Optica Publishing Intelligence (AI) training, and similar technologies, are reserved.