Focus on sub-nanometer measurement accuracy:distortion and reconstruction of dynamic displacement in a fiber-optic microprobe sensor

作     者：Yisi Dong Wenrui Luo Wenwen Li Chen Zhang Pengcheng Hu Haijin Fu Hongxing Yang Ruitao Yang Yongkang Dong Jiubin Tan 

作者机构：Center of Ultra-precision Optoelectronic InstrumentHarbin Institute of TechnologyHarbin 150080China Key Lab of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology)Ministry of Industry and Information TechnologyHarbin 150080China National Key Laboratory of Science and Technology on Tunable LaserHarbin Institute of TechnologyHarbin 150001China 

出 版 物：《Light(Advanced Manufacturing)》 (光(先进制造)(英文))

年 卷 期：2024年第5卷第4期

页      面：121-135页

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：supported by the National Key Research and Development Projects of China(No.2022YFF0705802) National Natural Science Foundation of China(62305090) China Postdoctoral Science Foundation(2023M730883) Fellowship of China National Postdoctoral Program for Innovative Talents(BX20230478) 

主　　题：Displacement measurement Fiber microprobe sensor High-bandwidth and large-amplitude frequency modulation Central wavelength stability Sub-nanometer measurements 

摘      要：We established a complete model and relationship between laser source characteristics and measurement accuracy of high precision fiber microprobe sensor(FMS)based on phase generated carrier *** laser carried out high-bandwidth frequency modulation to improve the measurement ***,the laser also carried out large-amplitude frequency modulation to eliminate tens of nanometers of nonlinear error,thus improving the measurement ***,the laser center wavelength is required to be stabilized under the above modulation to achieve a high measurement *** conflict between laser frequency modulation and central stability is revealed and analyzed alongside the distortion of measurement accuracy.A modified frequency stabilization method for laser source under high-bandwidth and large-amplitude modulation is proposed for improving measurement accuracy to realize sub-nanometer *** experimental results showed that when the modulation bandwidth was 1 MHz and maximum modulation amplitude was 2.61 GHz,the distributed feedback laser central wavelength stability was 2.9×10^(−10)(τ=1s)according to Allan ***,the relative expanded uncertainty of the laser wavelength was demonstrated to be superior to 5×10^(−8)(k=2)within 3 hr,which was at least one order of magnitude higher than that of the traditional *** resolution and stability of FMS is better than 0.4 nm,and the nonlinear error is reduced from tens of nm to 0.8 nm,which meets the requirements of sub-nanometer measurements.