Combining machine learning algorithms with traditional methods for resolving the atomic-scale dynamic structure of monolayer MoS_(2) in high-resolution transmission electron microscopy

作     者：Yu Meng Shuya Wang Xibiao Ren Han Xue Xuejun Yue Chuanhong Jin Shanggang Lin Fang Lin 蒙宇;王淑雅;任锡标;薛涵;岳学军;金传洪;林上港;林芳

作者机构：Department of Applied PhysicsCollege of Electronic EngineeringSouth China Agricultural UniversityGuangzhou 510642China State Key Laboratory of Silicon and Advanced Semiconductor MaterialsSchool of Materials Science and EngineeringZhejiang UniversityHangzhou 310027China Materials Sciences DivisionLawrence Berkeley National LaboratoryBerkeleyCA 94720USA 

出 版 物：《Chinese Physics B》 (中国物理B(英文版))

年 卷 期：2025年第34卷第1期

页      面：162-170页

核心收录：

学科分类：08[工学] 080502[工学-材料学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：financial support from the National Natural Science Foundation of China(Grant No.61971201) 

主　　题：aberration measurement high-resolution transmission electron microscopy feature-extraction networks exit-wave reconstruction monolayer MoS_(2) 

摘      要：High-resolution transmission electron microscopy(HRTEM)promises rapid atomic-scale dynamic structure ***,the precision limitations of aberration parameters and the challenge of eliminating aberrations in Cs-corrected transmission electron microscopy constrain resolution.A machine learning algorithm is developed to determine the aberration parameters with higher precision from small,lattice-periodic crystal *** proposed algorithm is then validated with simulated HRTEM images of graphene and applied to the experimental images of a molybdenum disulfide(MoS_(2))monolayer with 25 variables(14 aberrations)resolved in wide *** these measured parameters,the phases of the exit-wave functions are reconstructed for each image in a focal series of MoS_(2)*** images were acquired due to the unexpected movement of the specimen ***-dimensional data extraction reveals time-varying atomic structures and *** particular,the atomic evolution of the sulfur-vacancy point and line defects,as well as the edge structure near the amorphous,is visualized as the resolution has been improved from about 1.75?to 0.9 *** method can help salvage important transmission electron microscope images and is beneficial for the images obtained from electron microscopes with average stability.