Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe2 membranes

作     者：Bo Xu Zejuan Zhang Jiaze Qin Jiaqi Wu Luming Wang Jiankai Zhu Chenyin Jiao Wanli Zhang Juan Xia Zenghui Wang 

作者机构：Institute of Fundamental and Frontier SciencesUniversity of Electronic Science and Technology of ChinaChengdu 610054China Hubei Key Laboratory of Micro-Nanoelectronic Materials and DevicesHubei UniversityWuhan 430062China State Key Laboratory of Precision Measuring Technology and Instruments(Tianjin University)Tianjin 300350China School of Integrated Sciences and Engineering(Exemplary School of Microelectronics)University of Electronic Science and Technology of ChinaChengdu 610054China State Key Laboratory of Electronic Thin Films and Integrated DevicesUniversity of Electronic Science and Technology of ChinaChengdu 610054China 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程(英文))

年 卷 期：2025年第11卷第1期

页      面：313-320页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 0702[理学-物理学] 

基　　金：support from the National Science Fund for Distinguished Young Scholars(Grant No.T2325007) Opening Foundation of Hubei Key Laboratory of MicroNanoelectronic Materials and Devices(Grant No.K202307) National Natural Science Foundation of China(Grant Nos.62450003,62404029,62401104,U21A20459,62250073,61774029) Opening Foundation of State key laboratory of precision measuring technology and instruments(Tianjin University)(Grant No.Pilab2411) China Postdoctoral Science Foundation(Grant Nos.GZB20230107,GZB20240109) Natural Science Foundation of Sichuan Province(Grant Nos.2024NSFSC1408,2024NSFSC1430) 

主　　题：dynamic strain engineering dynamic tuning nanomechanical resonance cross scale mode coupling nanoelectromechanical systems terahertz atomic lattice vibration exploration exquisite physical processes nanoelectromechanical systems nems based 

摘      要：Nanoelectromechanical systems(NEMS)based on atomically-thin tungsten diselenide(WSe_(2)),benefiting from the excellent material properties and the mechanical degree of freedom,offer an ideal platform for studying and exploiting dynamic strain engineering and cross-scale vibration coupling in two-dimensional(2D)***,such opportunity has remained largely unexplored for WSe_(2)NEMS,impeding exploration of exquisite physical processes and realization of novel device ***,we demonstrate dynamic coupling between atomic lattice vibration and nanomechanical resonances in few-layer WSe_(2)*** a custom-built setup capable of simultaneously detecting Raman and motional signals,we accomplish cross-scale mode coupling between the THz crystal phonon and MHz structural vibration,achieving GHz frequency tuning in the atomic lattice modes with a dynamic gauge factor of 61.9,the best among all 2D crystals reported to *** findings show that such 2D NEMS offer great promises for exploring cross-scale physics in atomically-thin semiconductors.