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Linear study of magnetic sensing for MTJ devices based on CoFeB/MgO/ CoFeB magnetic films with large aspect ratio

作     者:Liu, Xing Song, Qiuming Yang, Jiahao Jia, Yuan Chen, Yulong Tian, Jinpeng Zhang, Zhixing Zhang, Wenwei 

作者机构:Shenzhen Technol Univ Sino German Coll Intelligent Mfg Industrializat Ctr Micro & Nano ICs & Devices Shenzhen 518118 Peoples R China Guangdong Univ Technol State Key Lab Precis Elect Mfg Technol & Equipment Guangzhou 510000 Peoples R China 

出 版 物:《SURFACE & COATINGS TECHNOLOGY》 (Surf. Coat. Technol.)

年 卷 期:2025年第498卷

核心收录:

学科分类:080503[工学-材料加工工程] 08[工学] 0805[工学-材料科学与工程(可授工学、理学学位)] 0702[理学-物理学] 

基  金:Guangdong Provincial Engineering Technology Research Center for Advanced MEMS Sensor Chip [2022GCZX005] University-enterprise cooperation research and development project of SZTU [20221061030010/20221064010022] MEMS Technology Innovation and Application Joint Laboratory (SZTU- CSL) State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment [JMDZ2021005] 

主  题:Magnetic material Magnetic tunnel junction Magnetic sensing Shape anisotropy 

摘      要:Since the discovery of the tunneling magnetoresistance (TMR) effect in magnetic tunnel junctions (MTJs), magnetic field sensors based on MTJ have gained much attention in the last decades due to their high sensitivity, low cost, and small size. This kind of sensor has a wide range of applications in the automotive industry and consumer electronics. With its high sensitivity and detection accuracy, it has the potential to detect weak magnetic fields. In this paper, a series of top-pinned MTJ was deposited and fabricated into magnetic devices by photolithography and etching, with the size of the MTJ in the range of 10-60 mu m2. We studied the interaction mechanism and the variation of magnetization directions in MTJ films. The properties of MTJ with different aspect ratio, annealing methods and free layer s thickness was measured. The MTJ devices firstly show a low hysteresis linear output in only large aspect ratio under single-step short-axis annealing. By the two-step annealing method, the dependence of MTJ s linear output on aspect ratio was successfully reduced. With appropriate free layer thicknesses and optimization of the two-step annealing method, the MTJ achieves a linear output with a sensitivity of 1.06 %/Oe and nearly zero hysteresis. These results are valuable for linearized sensing of MTJs based on shape anisotropy and for high-sensitivity magnetic field sensing applications.

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