Polymer-based humidity sensor with fast response and multiple functions

作     者：Li, Yalong Lan, Jian Hu, Jiahao Hu, Shouyuan Wang, Junbo Zhou, Feng Li, Pei Jiang, Jie Chen, Liang 

作者机构：Ningbo Univ Sch Phys Sci & Technol Ningbo 315211 Peoples R China Zhejiang GuoFu Environm Technol Co Ltd Hangzhou 311300 Peoples R China Fudan Univ State Key Lab Surface Phys Shanghai 200433 Peoples R China Fudan Univ Dept Phys Shanghai 200433 Peoples R China 

出 版 物：《MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING》 (Mater Sci Semicond Process)

年 卷 期：2025年第190卷

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：National Natural Science Foundation of China Scientific Research and Developed Funds of Ningbo University [ZX2022000015] State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai, P. R. China [KF2023_07] 

主　　题：Humidity sensor Polymer-based Self-powered Response time Health monitoring 

摘      要：Polymer-based films characterized by hydrophilic functional groups and porous structures are commonly utilized in humidity sensing due to their low-cost, non-toxic, and biodegradability. Despite advancements in polymer- based humidity sensors achieving rapid response time around 200 ms, many commonly used sensors still exhibit slower response time, often in the range of several seconds. Additionally, the absence of self-powered capabilities significantly restricts their practical applications. Here, we propose a humidity sensor based on a mixed cellulose ester (MCE) polymer film, featuring self-powering capability and high-power density. Notably, the sensor exhibits a response time of 80 ms, surpassing the currently reported state-of-the-art sensors with the response/recovery time of 150 ms, respectively. Furthermore, we demonstrate its applications in health monitoring and non-contact sensing for rapid detections of humidity changes associated with blinking, breathing, and finger interactions, highlighting the potential of next-generation humidity sensors.