Compact Turnkey Soliton Microcombs at Microwave Rates via Wafer-Scale Fabrication

作     者：Wang, Yuanlei Wang, Ze Lao, Chenghao Xu, Tianyu Cheng, Yinke Xie, Zhenyu Wang, Junqi Luo, Haoyang Zhou, Xin Ni, Bo Zhu, Kaixuan Liu, Yanwu Jin, Xing Wang, Min Liu, Jian-Fei Cao, Xuening Wang, Ting Gong, Qihuang Li, Bei-Bei Zhang, Fangxing Xiao, Yun-Feng Yang, Qi-Fan 

作者机构：State Key Laboratory for Artificial Microstructure and Mesoscopic Physics Frontiers Science Center for Nano-optoelectronics School of Physics Peking University Beijing100871 China Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing100190 China Peking University Yangtze Delta Institute of Optoelectronics Jiangsu Nantong226010 China Collaborative Innovation Center of Extreme Optics Shanxi University Taiyuan030006 China 

出 版 物：《arXiv》 (arXiv)

年 卷 期：2025年

核心收录：

主　　题：Microresonators 

摘      要：Soliton microcombs generated in nonlinear microresonators facilitate the photonic integration of timing, frequency synthesis, and astronomical calibration functionalities. For these applications, low-repetition-rate (f+) soliton microcombs are essential as they establish a coherent link between optical and microwave signals. However, the required pump power typically scales with f;+, and the device footprint scales with f,?, rendering low-f, soliton microcombs challenging to integrate within photonic circuits. This study designs and fabricates SigN4 microresonators on 4-inch wafers with highly compact form factors. The resonator geometries are engineered from ring to finger and spiral shapes to enhance integration density while attaining quality factors over 10’. Driven directly by an integrated laser, soliton microcombs with f, below 10 GHz are demonstrated via turnkey initiation. The phase noise performance of the synthesized microwave signals reaches -130 dBc Hz~* at 100 kHz offset frequency for 10 GHz carrier frequencies. This work enables the high-density integration of soliton microcombs for chip-based microwave photonics and spectroscopy applications. Copyright © 2025, The Authors. All rights reserved.