Hybrid metal-insulator-metal structures on Si nanowires array for surface enhanced Raman scattering

作     者：Kaichen Xu Chentao Zhang Tzu Hsiao Lu Puqun Wang Rui Zhou Rong Ji Minghui Hong 

作者机构：Department of Electrical and Computer Engineering National University of Singapore 4 Engineering Drive 3 117576 Singapore Data Storage Institute (A'STAR) Agency for Science Technology and Research 2 Fusionopolis Way 138634 Singapore Department of Mechanical and Electrical Engineering Xiamen University Xiamen 361005 China 

出 版 物：《光电工程》 (Opto-Electronic Engineering)

年 卷 期：2017年第44卷第2期

页      面：185-191页

核心收录：

学科分类：08[工学] 

基　　金：financial support from A*STAR SERC 2014 Public Sector Research Funding (PSF) Grant (SERC Project No. 1421200080) 

主　　题：surface-enhanced Raman scattering nanostructure fabrication plasmonics metal-insulator-metal 

摘      要：Surface enhanced Raman scattering(SERS)is an efficient technique to detect low concentration *** this work,periodical silicon nanowires(Si NWs)integrated with metal-insulator-metal(MIM)layers are employed as SERS *** interference lithography(LIL)combined with reactive ion etching(RIE)is used to fabricate large-area periodic nanostructures,followed by decorating the MIM *** to MIM disks array on Si surface,the SERS enhancement factor(EF)of the MIM structures on the Si NWs array can be increased up to 5 times,which is attributed to the enhanced electric field at the boundary of the MIM ***,high density of nanoparticles and nanogaps serving as hot spots on sidewall surfaces also contribute to the enhanced SERS *** changing the thickness of the insulator layer,the plasmonic resonance can be tuned,which provides a new localized surface plasmon resonance(LSPR)characteristic for SERS applications.