Evolution of Roughness on InP Layers Observed by Scanning Force Microscopy

作     者：M.A. Cotta R.A. Hamm S.N.G. Chu T.W. Staley L.R. Harriott M.B. Panish H. Temkin 

作者机构：AT&T Bell Laboratories Murray Hill USA Materials Science Program University of Wisconsin-Madison Madison USA Electrical Engineering Dept. Colorado State University Fort Collins USA 

出 版 物：《MRS Online Proceedings Library》 

年 卷 期：2020年第312卷第1期

页      面：23-28页

摘      要：The evolution of surface roughness with increasing thickness of (100) InP layers grown by metalorganic molecular beam epitaxy has been observed by scanning force microscopy. The process of roughening gives rise to periodic elongated features on the surface aligned in the % MathType!MTEF!2!1!+- % feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn % hiov2DGi1BTfMBaeXatLxBI9gBaerbd9wDYLwzYbItLDharqqtubsr % 4rNCHbGeaGqiVu0Je9sqqrpepC0xbbL8F4rqqrFfpeea0xe9Lq-Jc9 % vqaqpepm0xbba9pwe9Q8fs0-yqaqpepae9pg0FirpepeKkFr0xfr-x % fr-xb9adbaqaaeGaciGaaiaabeqaamaabaabaaGcbaGaai4waiaaic % daceaIXaGbaebacaaIXaGaaiyxaaaa!39FE! $$[0\bar 11]$$ direction, reflecting the surface anisotropy. The morphology eventually evolves to a grain-like surface. The roughening is dependent on both the group III and V flux, and the growth temperature, indicating that this phenomenon is kinetically controlled by surface diffusion activation. For each set of parameters chosen for the growth, there is a minimum temperature where smooth, two-dimensional growth can be obtained. Below that temperature the roughening shows two distinct power law regimes dependent on the epitaxial layer thickness.