A Novel Technique for the Fabrication of Free-Standing Adhesive Films Using a Polymer Template

作     者：D. J. Hansford L. P. Lee M. Ferrari 

作者机构：Biomedical Microdevices Center University of California Berkeley USA Department of Materials Science and Mineral Engineering U.C. Berkeley USA Applied Science and Technology Program U.C. Berkeley USA Department of Civil and Environmental Engineering U.C. Berkeley USA 

出 版 物：《MRS Online Proceedings Library》 

年 卷 期：1998年第518卷第1期

页      面：111-115页

摘      要：A technique has been developed that allows the application of free-standing membranes of polymer adhesives used in microfabricated structures. The film is made free-standing by the application of the adhesive to a polymer template, followed by an adhesion step to a microfabricated substrate, and the final release of the film by the removal of the polymer template. It was found that the surface treatment used to treat the Teflon template made it adhere too strongly to the adhesive film for this application. The results show that Gel-Paks make a suitable template for the transference of polymer films over holes of at least micron size.