Extending fault-based testing to microelectromechanical systems

作     者：Mir, S Charlot, B Courtois, B 

作者机构：TIMA Lab F-38031 Grenoble France 

出 版 物：《JOURNAL OF ELECTRONIC TESTING-THEORY AND APPLICATIONS》 (J Electron Test Theory Appl JETTA)

年 卷 期：2000年第16卷第3期

页      面：279-288页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 

主　　题：MEMS defects failure modes fault modeling HDLs fault simulation nodal simulation 

摘      要：As stable fabrication processes for MicroElectroMechanical Systems (MEMS) emerge, research efforts shift towards the design of systems of increasing complexity. The ways in which testing is going to be performed for large volume complex devices embedding MEMS are not known, As in the microelectronics industry, the development of cost-effective tests for larger systems may well require test stimuli targeting actual faults, developing fault lists and fault models fur realistic manufacturing defects and failure modes, and using fault simulation as a major approach fur assessing testability and dependability. In this paper, we illustrate how fault-based testing can be extended to MEMS, both for bulk and surface micromachining technologies, making possible the reuse of analog testing techniques.