Phase-shift calibration algorithm for phase-shifting interferometry

作     者：Chen, X Gramaglia, M Yeazell, JA 

作者机构：Penn State Univ Dept Phys University Pk PA 16802 USA 

出 版 物：《JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION》 (美国光学会志，A辑：光学、图象科学与视觉)

年 卷 期：2000年第17卷第11期

页      面：2061-2066页

核心收录：

学科分类：1002[医学-临床医学] 100212[医学-眼科学] 0702[理学-物理学] 10[医学] 

主　　题：extremum values Phase shift algorithms phase step ROOT-MEAN-SQUARE ERRORS sums interferometry analysis of algorithm Sinusoidal interference pattern Technology Root mean square 

摘      要：We propose a novel phase-shift calibration algorithm. With this technique we determine the unknown phase shift, between two interferograms by examining the sums and differences of the intensities on each interferogram at the same spatial location, i.e., I-1(x, y) +/- I-2(x, y) These intensities are normalized so that they become sinusoidal in form. A uniformly illuminated region of the interferograms that contains at least a 2 pi variation in phase is examined. The extrema of these sums and differences are found in this region and are used to find the unknown phase shift. An error analysis of the algorithm is provided. In addition, an error-correction algorithm is implemented. The method is tested by numerical simulation and implemented experimentally. The numerical tests, including digitization error, indicate that the phase step has a root-mean-square (RMS) phase error of less than 10(-6) deg. Even in the presence of added intensity noise (5% amplitude) the RMS error does not exceed 1 deg. The accuracy of the technique is not sensitive to nonlinearity in the interferogram. (C) 2000 Optical Society of America [S0740-3232(00)01711-7].