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作者机构:Chungnam Natl Univ Dept Elect Engn Daejeon 34134 South Korea LeoLSI Co Ltd Seoul 06728 South Korea
出 版 物:《MICROMACHINES》 (微型机械)
年 卷 期:2018年第9卷第7期
页 面:347-347页
核心收录:
学科分类:08[工学] 0804[工学-仪器科学与技术] 0805[工学-材料科学与工程(可授工学、理学学位)] 0703[理学-化学] 0802[工学-机械工程] 0702[理学-物理学]
基 金:LeoLSI Co., Ltd IC Design Education Center (IDEC)
主 题:capacitive microsensor analog front-end (AFE) capacitive sensor interface circuit reconfigurable sensor readout circuit delta-sigma modulation capacitance-to-digital converter (CDC) temperature sensor low-noise technique chopper stabilization
摘 要:This paper proposes a reconfigurable sensor analog front-end using low-noise chopper-stabilized delta-sigma capacitance-to-digital converter (CDC) for capacitive microsensors. The proposed reconfigurable sensor analog front-end can drive both capacitive microsensors and voltage signals by direct conversion without a front-end amplifier. The reconfigurable scheme of the front-end can be implemented in various multi-mode applications, where it is equipped with a fully integrated temperature sensor. A chopper stabilization technique is implemented here to achieve a low-noise characteristic by reducing unexpected low-frequency noises such as offsets and flicker noise. The prototype chip of the proposed sensor analog front-end is fabricated by a standard 0.18-mu m 1-poly-6-metal (1P6M) complementary metal-oxide-semiconductor (CMOS) process. It occupies a total active area of 5.37 mm(2) and achieves an effective resolution of 16.3-bit. The total power consumption is 0.843 mW with a 1.8 V power supply.