Hydrophobicity Recovery of Polydimethylsiloxane Treated with Oxygen Plasma and Ion Implantation

作     者：S Natyanun N Pussadee 

作者机构：Master's Degree Program in Physics Faculty of Science Chiang Mai University Chiang Mai 50200 Thailand Plasma and Beam Physics Research Facility Department of Physics and Materials Science Chiang Mai University Chiang Mai 50200 Thailand Thailand Center of Excellence in Physics Commission on Higher Education 328 Si Ayutthaya Rood Bangkok 10400 Thailand. 

出 版 物：《Journal of Physics: Conference Series》 

年 卷 期：2018年第1144卷第1期

学科分类：07[理学] 0702[理学-物理学] 

摘      要：One of a few disadvantage properties of polymethylsiloxane (PDMS) is its hydrophobicity which can hinder its fluidic applications. Oxygen plasma treatment on PDMS surfaces is a conventional method in rendering them hydrophilic, however hydrophobicity returns within days after treatment. This study proposes oxygen ion implantation at the micrometer scale inside PDMS structures to ensure lasting hydrophilicity. The PDMS slabs were treated with 20 keV oxygen ion with 1 × 1015 ions/cm2 fluence and inductively coupled oxygen plasma generated at a power of 28 W and frequency of 13.56 MHz. The chemical composition of the treated PDMS surface was monitored by X-ray photoelectron spectroscopy (XPS) and it was found that oxygen concentration remain high after three days of oxygen plasma treatment on the PDMS. Although the surface oxygen concentration in the oxygen ion implanted PDMS was not as high as that oxygen plasma treated PDMS, the oxygen concentration level was remained higher than that of the untreated PDMS surface for four weeks.