Mitigating Thermoelastic Dissipation of Flexural Micromechanical Resonators by Decoupling Resonant Frequency from Thermal Relaxation Rate

作     者：Xin Zhou Dingbang Xiao Xuezhong Wu Qingsong Li Zhanqiang Hou Kaixuan He Yulie Wu 

作者机构：College of Mechatronics Engineering and Automation National University of Defense Technology Changsha 410073 China East China Institute of Photo-Electronic IC Bengbu 233042 China 

出 版 物：《Physical Review Applied》 (Phys. Rev. Appl.)

年 卷 期：2017年第8卷第6期

页      面：064033-064033页

核心收录：

学科分类：07[理学] 0702[理学-物理学] 

基　　金：National Natural Science Foundation of China  NSFC  (51575521) 

主　　题：Continuum mechanics Linear acoustics Metrology Organic sensors Ultrasonics Micromechanical devices Nanomechanical devices 

摘      要：This paper reports an alternative design strategy to reduce thermoelastic dissipation (TED) for isothermal-mode micromechanical resonators. This involves hanging lumped masses on a frame structure to decouple the resonant frequency and the effective beamwidth of the resonators, which enables the separation of the thermal relaxation rate and frequency of vibration. This approach is validated using silicon-based micromechanical disklike resonators engineered to isolate TED. A threefold improvement in the quality factor and a tenfold improvement in the decay-time constant is demonstrated. This work proposes a solution for isothermal-mode (flexural) micromechanical resonators to effectively mitigate TED. Specifically, this approach is ideal for designing high-performance gyroscope resonators based on microelectromechanical systems (MEMS) technology. It may pave the way for the next generation inertial-grade MEMS gyroscope, which remains a great challenge and is very appealing.