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内蒙古自治区呼和浩特市赛罕区大学西街235号 邮编: 010021
作者机构:MIT Dept Mat Sci & Engn Cambridge MA 02139 USA MIT Dept Chem Engn Cambridge MA 02139 USA MIT Inst Soldier Nanotechnol Cambridge MA 02139 USA
出 版 物:《OPTICS LETTERS》 (光学快报)
年 卷 期:2005年第30卷第17期
页 面:2251-2253页
核心收录:
学科分类:070207[理学-光学] 07[理学] 08[工学] 0803[工学-光学工程] 0702[理学-物理学]
主 题:WAVE-GUIDES FILTERS FILMS
摘 要:As the complexity of microphotonic devices grows, the ability to precisely trim microring resonators becomes increasingly important. Photo-oxidation trimming uses UV irradiation to oxidize a cladding layer composed of polymerized hexamethyldisilane (6M2S) deposited with plasma-enhanced chemical vapor deposition (PECVD). PECVD 6M2S has optical properties that are compatible with microring devices, and its high cross linking renders it insoluble. Photo-oxidation decreases the refractive index of PECVD 6M2S by nearly 4%, permitting large resonance shifts that are not feasible with thermal trimming techniques. Resonance shifts from single-mode, 100 mu m diameter Si3N4 (n=2.2) rings were as large as 12.8 nm for the TE mode and 23.5 nm for the TM mode. (c) 2005 Optical Society of America.