Detecting Nano-Scale Vibrations in Rotating Devices by Using Advanced Computational Methods

作     者：del Toro, Raul M. Haber, Rodolfo E. Schmittdiel, Michael C. 

作者机构：Consejo Super Invest Cient Ctr Automat & Robot Madrid 28500 Spain Univ Autonoma Madrid Escuela Politecn Super E-28049 Madrid Spain 

出 版 物：《SENSORS》 (传感器)

年 卷 期：2010年第10卷第5期

页      面：4983-4995页

核心收录：

学科分类：0710[理学-生物学] 071010[理学-生物化学与分子生物学] 0808[工学-电气工程] 07[理学] 0804[工学-仪器科学与技术] 0703[理学-化学] 

基　　金：NANOCUT-INT [CIT-420000-2008-0013] 

主　　题：vibration measurement signal processing algorithm frequency domain analysis nanotechnology 

摘      要：This paper presents a computational method for detecting vibrations related to eccentricity in ultra precision rotation devices used for nano-scale manufacturing. The vibration is indirectly measured via a frequency domain analysis of the signal from a piezoelectric sensor attached to the stationary component of the rotating device. The algorithm searches for particular harmonic sequences associated with the eccentricity of the device rotation axis. The detected sequence is quantified and serves as input to a regression model that estimates the eccentricity. A case study presents the application of the computational algorithm during precision manufacturing processes.