Modulation transfer function measurements of Type-II mid- wavelength and long-wavelength infrared superlattice focal plane arrays

作     者：Rafol, Sir (Don) B. Gunapala, Sarath D. Keo, Sam A. Ting, David Z. Soibel, Alex Khoshakhlagh, Arezou Hill, Cory J. Luong, Edward Fisher, Anita M. Mumolo, Jason M. Liu, John K. Pepper, Brian 

作者机构：CALTECH Jet Prop Lab Ctr Infrared Sensors 4800 Oak Grove Dr Pasadena CA 91109 USA 

出 版 物：《INFRARED PHYSICS & TECHNOLOGY》 (红外物理学与技术)

年 卷 期：2019年第96卷

页      面：251-261页

核心收录：

学科分类：070207[理学-光学] 07[理学] 08[工学] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：National Aeronautics and Space Administration 

主　　题：Type-II Superlattice High Operating Temperature (HOT) MWIR LWIR NEDT Dark current Quantum Efficiency Modulation Transfer Function 

摘      要：Mid-wavelength Infrared (MWIR) and long-wavelength infrared (LWIR) Barrier Infrared Detector (BIRD) based on Antimonides Type-II superlattice detector array material are hybridized to 640 x 512, 1024 x 1024 and 1344 x 784 pixels format read out integrated circuits. The focal plane arrays (FPAs) Noiie Equivalent Temperature Difference (NE Delta T), Quantum Efficiency (eta), Dark Current Density (J(D)), and Modulation Transfer Function (MTF) performance were measured at operating temperatures. High performance 640 x 512 array format MWIR High Operating Temperature (HOT) FPA has typical NE Delta T similar to 19 mK, J(D) similar to 6.2 x 10(-7) A/cm(2), and eta similar to 53% using 3-5 pm band pass filter at 115 K operating temperatures. Best performance 640 x 512 array format LWIR FPA has NE Delta T similar to 25 mK, J(D) similar to 2.5 x 10(-5) A/cm(2) and eta similar to 41% using 8-9.4 mu m band pass filter at 60 K operating temperatures. For MTF investigation, a novel direct one-to-one image approach of Line Spread Function (LSF) and Edge Spread Function (ESF) are patterned onto substrate-removed FPAs. The direct ISF and ESF image are produced by 1000 A degrees thick gold layer deposition. The direct image horizontal and vertical MTFs are compared with projected knife-edge ESF-derived MTFs and results indicate that direct image MTFs have higher values compared to projected knife-edge ESF-derived MTFs at a Nyquist frequency. However, direct image MIT requires no lens MTF correction. The only relevant requirement for the direct image MTF is for the deposited pattern and substrate to be extremely thinned in which the HOT-BIRD FPAs fulfilled for this investigation.