Properties of W/DLC/W-S-C composite films fabricated by magnetron sputtering

作     者：代明江 韦春贝 周克崧 朱敏 侯惠君 林松盛 佟鑫 

作者机构：华南理工大学材料科学与工程学院广州510640 广州有色金属研究院新材料研究所广州510650 广州有色金属研究院现代材料表面工程技术国家工程实验室广州510650 

出 版 物：《Transactions of Nonferrous Metals Society of China》 (中国有色金属学报（英文版）)

年 卷 期：2015年第25卷第9期

页      面：3002-3011页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

主　　题：W/DLC/W-S-C composite film magnetron sputtering adhesion strength friction coefficient 

摘      要：A kind of W/DLC/W-S-C composite film was fabricated by magnetron sputtering *** of WSx content on the structure and the adhesion of the composite films were *** addition,tribological behavior of the composite films was studied in the conditions of the ambient air and N2 gas atmosphere by ball-on-disk *** results indicate that the composite films show dense and amorphous *** WCx and WSx compounds are found in amorphous diamond like carbon matrix in the top layers of W-S-C.A proper WSx content is beneficial for improving the adhesion of the composite *** air atmosphere,the composite films with high C content have better wear resistance and the friction coefficients range from 0.15 to *** N2 condition,high WSx content is benefit for the wear resistance and the friction coefficients of the composite films range from 0.03 to 0.1.