New fabrication process elements of Phase-Mode Logic Circuits

作     者：Onomi, T Nakajima, K 

作者机构：Tohoku Univ Elect Commun Res Inst Lab Elect Intelligent Syst Aoba Ku Sendai Miyagi 9808577 Japan 

出 版 物：《IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY》 (IEEE Trans Appl Supercond)

年 卷 期：1999年第9卷第2期

页      面：3318-3321页

核心收录：

学科分类：0808[工学-电气工程] 08[工学] 0702[理学-物理学] 

主　　题：Fabrication Logic circuits Niobium Josephson junctions Resistors Shunt (electrical) Inductance Voltage Feeds Inductors 

摘      要：We present the phase-mode circuits based on new fabrication process elements for high-density circuit integration. Nb/AlNx/Nb overdamped junctions without external resistive shunts are applied to the phase-mode circuits. The area of a bias feed resistor can be reduced by a replacement of the metallic resistor by the junction normal resistance. As a miniaturization method of an inductance, the effective inductance of a Josephson junction is used. The phase-mode circuits based on these new integration methods have been fabricated by Nb integration technology. Various aspects which are brought about by these fabrication technologies are discussed.