Dual Actuation for High Speed Atomic Force Microscopy

作     者：S. Kuiper A.J. Fleming G. Schitter 

作者机构：Delft Center for Systems and Control Precision and Microsystems Engineering Delft University of Technology Mekelweg 2 2628CD Delft The Netherlands School of Electrical Engineering and Computer Science University of Newcastle Callaghan NSW 2308 Australia Automation and Control Institute Vienna University of Technology Gusshausstrasse 27-29 1040 Vienna Austria 

出 版 物：《IFAC Proceedings Volumes》 

年 卷 期：2010年第43卷第18期

页      面：220-226页

主　　题：Atomic Force Microscopy model-based control piezoelectric actuator dual actuation 

摘      要：In atomic force microscopy (AFM) the imaging speed is strongly limited by the bandwidth of the feedback loop that controls the interaction between the measurement tip and the sample. A significant increase in closed-loop bandwidth can be achieved by combining a long-range, low-bandwidth actuator with a short-range, high-bandwidth actuator, forming a dual actuated system. This contribution discusses the design of a model-based feedback controller that controls the tip-sample interaction in dual actuated AFM. In order to guarantee closed-loop stability, the dynamic uncertainties of the system are identified and taken into account in the controller design. Two different design cases are discussed, showing the trade-off between the positioning range at lower frequencies and the positioning range at higher frequencies. The designed feedback controller is implemented on the prototype AFM system and demonstrates a disturbance rejection bandwidth of 20 kHz.