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作者机构:Scuola Super Sant Anna MiTech Lab I-56127 Pisa Italy
出 版 物:《IEE PROCEEDINGS-CIRCUITS DEVICES AND SYSTEMS》 (IEE Proc Circuits Devices Syst)
年 卷 期:2001年第148卷第6期
页 面:348-352页
核心收录:
主 题:microdevice assembly tracking experiments control algorithm two-term control proportional integral force control assembling strain gauges microsensors biomedical microdevices force control micromanipulators force feedback microassembling PI force control microgripper flexure joints semiconductor strain gauges force sensors biomedical equipment LIGA workstation
摘 要:Recent work is presented on the control of a microgripper based on flexure joints, fabricated by LIGA and instrumented with force sensors. The force sensors are semiconductor strain gauges which have been integrated in the microgripper and experimentally characterised. The microgripper is the core component of a workstation developed to grasp and manipulate tiny objects, such as components of biomedical microdevices. A proportional integral (PI) force control of the microgripper has been implemented. The results of the tracking experiments prove that this control algorithm can assure performance suitable for the intended applications.