Integrated optical micromachined pressure sensor with spectrally encoded output and temperature compensation

作     者：De Brabander, GN Beheim, G Boyd, JT 

作者机构：Univ Cincinnati Dept Elect & Comp Engn & Comp Sci Cincinnati OH 45221 USA 

出 版 物：《APPLIED OPTICS》 (应用光学)

年 卷 期：1998年第37卷第15期

页      面：3264-3267页

核心收录：

学科分类：070207[理学-光学] 07[理学] 08[工学] 0803[工学-光学工程] 0702[理学-物理学] 

主　　题：optical integration Optical Fibers Pressure measurement spectrum coding Sensors Pressure Sensor Device Component Polarization interferometers temperature compensation 

摘      要：A promising type of optical pressure sensor combines an integrated optical interferometer with a micro-machined diaphragm on a shared silicon substrate. We have demonstrated a sensor of this type that uses an unbalanced Mach-Zehnder waveguide interferometer together with a broadband source to produce a spectrally encoded measurement. This spectral encoding mechanism is advantageous as it is not readily degraded by transmission through optical fibers. We have also demonstrated a means to obtain a temperature-compensated pressure measurement by interrogating both polarization eigenmodes of the interferometer. (C) 1998 Optical Society of America.