Design of microfabricated inductors

作     者：Daniel, L Sullivan, CR Sanders, SR 

作者机构：Univ Calif Berkeley Dept Elect Engn & Comp Sci Berkeley CA 94720 USA 

出 版 物：《IEEE TRANSACTIONS ON POWER ELECTRONICS》 (IEEE Trans Power Electron)

年 卷 期：1999年第14卷第4期

页      面：709-723页

核心收录：

学科分类：0808[工学-电气工程] 08[工学] 

基　　金：National Semiconductor University of California, UC 

主　　题：anisotropy application automatic design buck converter code coil fabrication process computer program control of permeability design design example design methodology distributed gap eddy currents efficiency end turns fabrication process hard-baked photoresist high-frequency power inductors hysteresis losses inductance adjustment inductor geometries inductors loss analysis magnetic thin films microfabricated inductors microfabricated inductors design multilayer core multiturn windings numerical simulation optimization permalloy planar inductors power density quasi-distributed gap resonant converter secondary effects SEM pictures 

摘      要：Possible configurations for microfabricated inductors are considered, Inductance can be set by adjusting permeability through control of anisotropy of a permalloy core or via a patterned quasi-distributed gap. A design methodology based on a simple model is proposed. A more accurate model and a numerical optimization are also developed. Design examples for 5- and 10-MHz buck converters and 2.5-MHz resonant converter applications are presented.