Design and implementation of a high performance E-Beam tester

作     者：Rao, V.R.M. Winer, P. 

作者机构：Intel Corp United States 

出 版 物：《Microelectronic Engineering》 (Microelectron Eng)

年 卷 期：1990年第12卷第1-4期

页      面：295-302页

核心收录：

学科分类：0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 

主　　题：Integrated Circuits, VLSI 

摘      要：This paper describes a complete E-Beam testing system that has been constructed for the electrical probing of VLSI Integrated Circuits. The instrument comprises a custom built electron optical column optimized for E-Beam test, control and signal processing electronics and a Microvax II computer and custom software for user interface. The instrument has been used to electrically probe complex logic and memory products including Intel s line of 80×86 Microprocessors and EPROMS. The system has been used primarily to support failure analysis and chip debug. This paper describes the overall system implementation together with details of the optical and software design. Instrument performance and application results are also presented.