PROBLEM-ORIENTED MODELING OF MICROTRANSDUCERS - STATE-OF-THE-ART AND FUTURE CHALLENGES

作     者：WACHUTKA, G 

作者机构：Physical Eletronics Laboratory Swiss Federal Institute of Technology ETH-Hö nggerberg HPT CH-8093 Zurich Switzerland 

出 版 物：《SENSORS AND ACTUATORS A-PHYSICAL》 (传感器与执行机构，A辑：物理传感器)

年 卷 期：1994年第41卷第1-3期

页      面：279-283页

核心收录：

学科分类：12[管理学] 1201[管理学-管理科学与工程(可授管理学、工学学位)] 0808[工学-电气工程] 08[工学] 0804[工学-仪器科学与技术] 

主　　题：Microelectronics 

摘      要：The development and production of well-performing and inexpensive microsensors, actuators or complete microsystems are largely determined by intricate trade-off considerations. Optimum performance requires a judicious design based on a detailed understanding of the physical phenomena which govern the operation of single system components as well as their cooperation. To this purpose, modeling and numerical simulation are regarded as increasingly useful or even as indispensable. Problem-oriented modeling does not only reduce the number of costly and time-consuming experimental trial-and-error steps, but it also lends unique insight into the interior of a miniaturized device showing the distributions of various physical quantities which are not readily accessible to experiments. Future work has mostly to concentrate on a user-friendly modular CAD tool box based on the concepts of tailored modeling . This implies not only modem flexible software techniques and highly efficient computational methods, but in particular new methodologies for fast and reliable model validation and the availability of a process-oriented material-property data base.