An Effort for Improving Transport Efficiency of Plasma in Acurved Magnet Filter

作     者：Hu Yawei LI Liuhe XU Ming LIU You-ming CAI Xun CHU P K 

作者机构：School of materials science and technology Shanghai Jiao Tong University Shanghai 200240 School of materials science and technology Shanghai Jiao Tong University Shanghai 200240 School of Mechanical Engineering and Automation Beijing University of Aeronautics and Astronautics. Beijing 100083 P. R. China Dept. of Physics & Materials Science City University of Hong Kong Kowloon Hong Kong 

出 版 物：《材料保护》 (MATERIALS PROTECTION)

年 卷 期：2004年第37卷第S2期

页      面：125-127页

核心收录：

学科分类：08[工学] 080502[工学-材料学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：This work was jointly supported by National Natural Science Foundation of China(50271004) Germany / Hong Kong RGC Joint Research Scheme G_HK001/02(CityU designation 9050165) City University of Hong Kong SRG(7001389) 

主　　题：curved magnet filter Langmuir probe ion saturation current ion density 

摘      要：In this article an effort was made to increase the efficiency of plasma transmission by using a additional wire netting between the substrate and the filter duct which was floated. The substrate was biased with a negative voltage or connected to anode, respectively. the parameters of the exited plasma and ion saturation current are examined by Langmuir probe and current collector plate. It was found that When the wire netting is connected to apositive voltage and the substrate is biased with a negative voltage, the ion saturation current and ion density had obviously improvement . The result proved that this method could improve the ion saturation current and ion density.