Microring resonator for glucose sensing applications

作     者：Yao CHEN Zhengyu LI Huaxiang YI Zhiping ZHOU Jun YU 

作者机构：Department of Electronic Science and Technology Huazhong University of Science and Technology Wuhan National Laboratory for Optoelectronics Huazhong University of Science and Technology State Key Laboratory on Advanced Optical Communication Systems and Networks Peking University School of Electrical and Computer Engineering Georgia Institute of Technology 

出 版 物：《Frontiers of Optoelectronics》 (光电子前沿(英文))

年 卷 期：2009年第2卷第3期

页      面：304-307页

学科分类：080904[工学-电磁场与微波技术] 0809[工学-电子科学与技术（可授工学、理学学位）] 080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程] 

基　　金：partially supported by the National Basic Research Program of China (Grant No. 2006CB708310) the National Natural Science Foundation of China (Grant No. 60578048) 

主　　题：microring resonator chemical sensor glucose sensing refractive index unit (RIU) Q factor 

摘      要：Silicon nitride microring resonators were demonstrated as chemical sensors. The microring devices,with diameter of 100 μm, were fabricated using complementary metal oxide semiconductor（CMOS）-compatible technology, and a high Q factor of 15000 was realized with free spectrum range（FSR） of 2 nm. The structures were further packaged to perform as chemical sensors, and their functionality was proved using deionized water（DI water）and ethanol as detecting mediums. Lastly, the packaged chips were used to detect glucose solutions with various concentrations, and a detection capability of refractive index change of 10–3refractive index unit（RIU） was obtained.