Traceable nanometrology realized by means of nanopositioning and nanomeasuring machine

作     者：Jäger, G. Manske, E. Hausotte, T. Mastylo, R. Dorozhovets, N. Hofmann, N. 

作者机构：Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology P.O. Box 100 565 98684 Ilmenau Germany 

出 版 物：《Key Engineering Materials》 (Key Eng Mat)

年 卷 期：2008年第381-382卷

页      面：565-568页

核心收录：

学科分类：08[工学] 0803[工学-光学工程] 0702[理学-物理学] 

主　　题：Nanoprobes 

摘      要：The today s nanometrology limits the accuracy of the precision engineering. These limits are based on the meter definition as redefined in 1983. It is proposed to define precision mechatronics as the science and engineering of high level precision systems and machines. The paper describes a precision mechatronic machine. This device represents a long range positioning machine having a resolution of 0.I nm over the range of 25 mm × 25 mm × 5 mm. The integration of several optical and tactile nanoprobes makes the 3D-nanopositioning suitable for various tasks. New developed nanoprobes (optical focus probe, nanoindenter, metrological scanning force microscope) and results of measurement will be presented.