版权所有:内蒙古大学图书馆 技术提供:维普资讯• 智图
内蒙古自治区呼和浩特市赛罕区大学西街235号 邮编: 010021
作者机构:Harbin Inst Technol Shenzhen Shenzhen 518055 Peoples R China Guangdong Univ Technol Minist Educ Key Lab Precis Microelect Mfg Technol & Equipment Guangzhou 510006 Guangdong Peoples R China
出 版 物:《IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY》 (IEEE Trans. Compon. Packag. Manufact. Tech.)
年 卷 期:2019年第9卷第5期
页 面:998-1006页
核心收录:
学科分类:0808[工学-电气工程] 08[工学] 0805[工学-材料科学与工程(可授工学、理学学位)] 0802[工学-机械工程]
基 金:National Natural Science Foundation of China [U1713206] Basic Research Plan of Shenzhen [JCYJ20170413112645981, JCYJ20170307151848226, CYJ20150928162432701] Shenzhen Technology Innovation Program [JCYJ20170811160003571]
主 题:Principal component analysis (PCA) recognition and classification support vector machine (SVM) model wire bonding joint
摘 要:Recognition and classification for wire bonding joint are important to quality assurance in semiconductor device manufacturing. In this paper, a precision recognition and classification system for bonding joint of ultrasonic heavy aluminum wire based on image feature and support vector machine (SVM) is presented. This system consists of feature extraction from images and classification model. In feature extraction, image processing algorithms including Canny edge extraction, histogram equalization, and image morphology closed operation are utilized to extract and locate a joint contour in a complicated background image. In the classification model, the principal component analysis (PCA) is employed to visualize, reconstruct, and reduce the images data dimension for less computation time. The SVM-based model is chosen as the classifier to identify and recognize joint types. The Gauss-radial basis function (RBF) kernel function is adopted in SVM, and its optimal parameters are determined by cross-validation. In the experiment, 588 bonding images are used to implement in this recognition and classification system. The results prove that the classification accuracy for wire bonding joint based on image feature, PCA, and SVMcan achieve to 97.3%, and the computation time can be reduced significantly.