A Flexible Piezoelectret Actuator/Sensor Patch for Mechanical Human-Machine Interfaces

作     者：Zhong, Junwen Ma, Yuan Song, Yu Zhong, Qize Chu, Yao Karakurt, Ilbey Bogy, David B. Lin, Liwei 

作者机构：Univ Calif Berkeley Mech Engn Dept Berkeley CA 94720 USA Chinese Acad Sci Inst Elect State Key Lab Transducer Technol Beijing 100190 Peoples R China Tsinghua Berkeley Shenzhen Inst Shenzhen 518055 Peoples R China Nanyang Technol Univ TL Singapore 637553 Singapore 

出 版 物：《ACS NANO》 (ACS纳米)

年 卷 期：2019年第13卷第6期

页      面：7107-7116页

核心收录：

学科分类：07[理学] 070203[理学-原子与分子物理] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0702[理学-物理学] 

基　　金：TBSI 

主　　题：human interactivity wearable electronics actuator/sensor dual-functional piezoelectret 

摘      要：Flexible and wearable devices with the capabilities of both detecting and generating mechanical stimulations are critical for applications in human-machine interfaces, such as augmented reality (AR) and virtual reality (VR). Herein, a flexible patch based on a sandwiched piezoelectret structure is demonstrated to have a high equivalent piezoelectric coefficient of d(33) at 4050 pC/N to selectively perform either the actuating or sensing function. As an actuator, mechanical vibrations with a peak output force of more than 20 mN have been produced, similar to those from the vibration mode of a modern cell phone, and can be easily sensed by human skin. As a sensor, both the pressure detection limit of 1.84 Pa for sensing resolution and excellent stability of less than 1% variations in 6000 cycles have been achieved. The design principle together with the sensing and driving characteristics can be further developed and extended to other soft matters and flexible devices.