Progress in achieving high-performance piezoresistive and capacitiveflexible pressure sensors: A review

作     者：Wufan Chen Xin Yan Wufan Chen;Xin Yan

作者机构：College of Information Science and EngineeringState Key Laboratory of Synthetical Automation for Process IndustriesNortheastern UniversityShenyang110819China 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2020年第36卷第8期

页      面：175-188页

核心收录：

学科分类：080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程] 

基　　金：supported by the National Natural Science Foundation of China(Nos.61775032,61475134 and 11604042) the Fundamental Research Funds for the Central Universities(N170405007,N180406002,N180408018 and N160404009) the 111 Project(B16009) 

主　　题：Electronic skin Flexible pressure sensor Piezoresistivity Capacitive pressure sensor 

摘      要：Electronic skin(e-skin) and flexible wearable devices are currently being developed with broad application prospects. Transforming electronic skin(e-skin) into true ¨skin¨is the ultimate goal. Tactile sensing is a fundamental function of skin and the development of high-performance flexible pressure sensors is necessary to realize thus. Many reports on flexible pressure sensors have been published in recent years,including numerous studies on improving sensor performance, and in particular, sensitivity. In addition,a number of studies have investigated self-healing materials, multifunctional sensing, and so on. Here,we review recent developments in flexible pressure sensors. First, working principles of flexible pressure sensors, including piezoresistivity, capacitance, and piezoelectricity, are introduced, as well as working mechanisms such as triboelectricity. Then studies on improving the performance of piezoresistive and capacitive flexible pressure sensors are discussed, in addition to other important aspects of this intriguing research field. Finally, we summarize future challenges in developing novel flexible pressure sensors.