Shintate, Kyoji Terada, Koji Usui, Motofumi Tsujihata, Akio Miyasaka, Akihiro
Large Deployable Reflector (LDR)
[J].Journal of the National Institute of Information and Communications Technology,2003,3-4(50):33-39.
Trinque, Brian C. Chiba, Takashi Hung, Raymond J. Chambers, Charles R. Pinnow, Matthew J. Osburn, Brian P. Tran, Hoang V. Wunderlich, Jennifer Hsieh, Yu-Tsai Thomas, Brian H. Shafer, Gregory DesMarteau, Darryl D. Conley, Will Grant Willson, C.
Recent advances in resists for 157 nm microlithography
[J].Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures,2002,2(20):531-536.
暂无评论