TCS(Trichlorosilane,SiHCl3)and other Chlorosilane were used abundantly in semiconductor and solar energy industries as the principal resource to generate ultrapure silicon in *** are mostly acutely toxic,water-reactiv...
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ISBN:
(纸本)9781510819702
TCS(Trichlorosilane,SiHCl3)and other Chlorosilane were used abundantly in semiconductor and solar energy industries as the principal resource to generate ultrapure silicon in *** are mostly acutely toxic,water-reactive and corrosive *** in the fires,TCS might form Silicon dioxide,Chlorine and Hydrogen gases and were difficult to *** were numerous fires due to TCS’s flammability,such as overturned truck in Michigan,US,1989and leaking in solar manufacturer in Pingtung,Taiwan,*** concerns aroused among the relevant agencies on how to put out fires and how to reduce *** study showed liquid nitrogen could yield extinguishing ability with its cooling and suffocation *** liquid nitrogen drew the heat from combustion reaction and reduced the flammable vapor to quench *** key parameter was liquid nitrogen application in large amount could effectively extinguish TCS *** TCS showed unchanged properties and still had potential to flame.
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