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检索条件"任意字段=16th European Conference on Mask Technology for Integrated Circuits and Microcomponents"
97 条 记 录,以下是21-30 订阅
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mask availability for next-generation lithography
Mask availability for next-generation lithography
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18th european conference on mask technology for integrated circuits and microcomponents
作者: Lercel, MJ Fisch, E Racette, KC Lawliss, M Williams, CT Kindt, L Huang, C IBM Corp Photron NGL Mask Ctr Competency Essex Jct VT 05452 USA
the Next Generation Lithography (NGL) mask Center of Competency (MCoC) has been developing mask technology to support all of the major next generation lithographies for several years. Cross-cutting process development... 详细信息
来源: 评论
Investigation of Cr etch chamber seasoning
Investigation of Cr etch chamber seasoning
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20th european conference on mask technology for integrated circuits and microcomponents
作者: Nesladek, P Ruhl, G Kristlib, M Adv Mask Technol Ctr Dresden Germany
One of the most critical steps for photomask CD off-target is the patterning of the mask. Here the instability of the dry etch process contributes directly to the stability of the CD value. the increasing demands on h... 详细信息
来源: 评论
Early mask making during the 1960's in Dresden
Early mask making during the 1960's in Dresden
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19th european conference on mask technology for integrated circuits and microcomponents
作者: Becker, HW Fraunhofer Inst Photon Mikrosyst IPMS Dresden Germany
One of the first european institutes for microelectronics, the Arbeitsstelle fur Molekularelektronik Dresden AME, was founded in 1961 by WERNER HARTMANN. the purpose was to develop processes for fabrication of integra... 详细信息
来源: 评论
mask quality (control) evaluation using the Virtual Stepper System (VSSTM)
Mask quality (control) evaluation using the Virtual Stepper ...
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16th european conference on mask technology for integrated circuits and microcomponents
作者: Karklin, Linard Weed, J.Tracy Li, Junling Numerical Technologies Inc San Jose United States
the Virtual Stepper System (VSSTM) demonstrates high sensitivity and good accuracy to measure critical dimension (CD) variations and is capable of accurately predicting how CD variations are transferred into silicon. ... 详细信息
来源: 评论
Integration of mask R&D and mask manufacturing to support the european semiconductor industry
Integration of mask R&D and mask manufacturing to support th...
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19th european conference on mask technology for integrated circuits and microcomponents
作者: Dilger, M AMTC Adv Mask Technol Ctr D-01330 Dresden Germany
the increasing gap between microelectronics minimum feature size and the exposure wavelength is a key challenge to the semiconductor industry. In the last 3 to 5 years mask technology has become a key contribute to br... 详细信息
来源: 评论
High precision mask repair using nanomachining
High precision mask repair using nanomachining
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18th european conference on mask technology for integrated circuits and microcomponents
作者: Verbeek, M White, R Klos, M Infineon Technol AG Munich Germany
Nanomachining has recently been introduced as a new option for the repair of photomasks. the RAVE nm1300 system is a high precision system for subtractive removal of opaque mask defects. the first such system was inst... 详细信息
来源: 评论
Method to determine a detection capability of the die-to-database mask inspection system in regard to pinhole and pindot defects
Method to determine a detection capability of the die-to-dat...
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19th european conference on mask technology for integrated circuits and microcomponents
作者: Avakaw, SM Opto Mech Equipment Design Off Precis Elect Tools Bldg Minsk BELARUS
the paper presents a description and results of the use of a new method to determine a capability to detect defects such as pinholes and pindots in order to test reticle and photomask inspection systems EM-6029B and E... 详细信息
来源: 评论
mask technologies for deep X-ray LIGA
Mask technologies for deep X-ray LIGA
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19th european conference on mask technology for integrated circuits and microcomponents
作者: Singleton, L Detemple, P Inst Mikrotech Mainz GmbH D-55129 Mainz Germany
masks for LIGA applications requiring deep X-ray lithography have different specifications compared to those masks used in microelectronic applications. Generally, deep X-ray LIGA applications require resist heights g... 详细信息
来源: 评论
mask error enhancement factor
Mask error enhancement factor
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16th european conference on mask technology for integrated circuits and microcomponents
作者: Maurer, W. Infineon Technologies AG Munich Germany
Optical lithography at the limit of resolution is a highly non-linear pattern transfer process. One consequence of this is an apparent magnification of mask errors. the paper first demonstrates early experimental evid... 详细信息
来源: 评论
Use of nanomachining for 100 nanometer mask repair
Use of nanomachining for 100 nanometer mask repair
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19th european conference on mask technology for integrated circuits and microcomponents
作者: LoBianco, B White, R Nawrocki, T RAVE LLC (United States)
Nanomachining has recently been introduced as a new technology for subtractive repair of 130-nanometer masks. the RAVE LLC nm 1300 utilizes this innovative strategy, facilitating repairs of all materials currently use... 详细信息
来源: 评论