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检索条件"任意字段=17th European Conference on Mask Technology for Integrated Circuits and Microcomponents"
96 条 记 录,以下是21-30 订阅
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Inspection of alternating PSM reticles using UV-based 365 nm reticle inspection tool
Inspection of alternating PSM reticles using UV-based 365 nm...
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18th european conference on mask technology for integrated circuits and microcomponents
作者: Rosenbusch, A Har-zvi, M Gottlib, G Etec Syst Inc Appl Mat Co Hayward CA 94545 USA
the paer presents results of a thorough study using the UV-based die-to-database mask inspection system ARIS(TM) 100i for the inspection of alternating phase shifting masks (AAPSM) designed for KrF (249nm) technology.... 详细信息
来源: 评论
Inspecting alternating phase shift masks by matching stepper conditions
Inspecting alternating phase shift masks by matching stepper...
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19th european conference on mask technology for integrated circuits and microcomponents
作者: Hemar, S Rosenbusch, A Etec Syst Mask Business Grp IL-76705 Rehovot Israel
the paper presents a new technology to inspect alternating phase shifting masks. Instead of finding defects based on a size-dependent defect specification, defects are found according to their impact at the wafer CD r... 详细信息
来源: 评论
mask availability for next-generation lithography
Mask availability for next-generation lithography
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18th european conference on mask technology for integrated circuits and microcomponents
作者: Lercel, MJ Fisch, E Racette, KC Lawliss, M Williams, CT Kindt, L Huang, C IBM Corp Photron NGL Mask Ctr Competency Essex Jct VT 05452 USA
the Next Generation Lithography (NGL) mask Center of Competency (MCoC) has been developing mask technology to support all of the major next generation lithographies for several years. Cross-cutting process development... 详细信息
来源: 评论
Investigation of Cr etch chamber seasoning
Investigation of Cr etch chamber seasoning
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20th european conference on mask technology for integrated circuits and microcomponents
作者: Nesladek, P Ruhl, G Kristlib, M Adv Mask Technol Ctr Dresden Germany
One of the most critical steps for photomask CD off-target is the patterning of the mask. Here the instability of the dry etch process contributes directly to the stability of the CD value. the increasing demands on h... 详细信息
来源: 评论
Early mask making during the 1960's in Dresden
Early mask making during the 1960's in Dresden
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19th european conference on mask technology for integrated circuits and microcomponents
作者: Becker, HW Fraunhofer Inst Photon Mikrosyst IPMS Dresden Germany
One of the first european institutes for microelectronics, the Arbeitsstelle fur Molekularelektronik Dresden AME, was founded in 1961 by WERNER HARTMANN. the purpose was to develop processes for fabrication of integra... 详细信息
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Integration of mask R&D and mask manufacturing to support the european semiconductor industry
Integration of mask R&D and mask manufacturing to support th...
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19th european conference on mask technology for integrated circuits and microcomponents
作者: Dilger, M AMTC Adv Mask Technol Ctr D-01330 Dresden Germany
the increasing gap between microelectronics minimum feature size and the exposure wavelength is a key challenge to the semiconductor industry. In the last 3 to 5 years mask technology has become a key contribute to br... 详细信息
来源: 评论
High precision mask repair using nanomachining
High precision mask repair using nanomachining
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18th european conference on mask technology for integrated circuits and microcomponents
作者: Verbeek, M White, R Klos, M Infineon Technol AG Munich Germany
Nanomachining has recently been introduced as a new option for the repair of photomasks. the RAVE nm1300 system is a high precision system for subtractive removal of opaque mask defects. the first such system was inst... 详细信息
来源: 评论
Method to determine a detection capability of the die-to-database mask inspection system in regard to pinhole and pindot defects
Method to determine a detection capability of the die-to-dat...
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19th european conference on mask technology for integrated circuits and microcomponents
作者: Avakaw, SM Opto Mech Equipment Design Off Precis Elect Tools Bldg Minsk BELARUS
the paper presents a description and results of the use of a new method to determine a capability to detect defects such as pinholes and pindots in order to test reticle and photomask inspection systems EM-6029B and E... 详细信息
来源: 评论
mask technologies for deep X-ray LIGA
Mask technologies for deep X-ray LIGA
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19th european conference on mask technology for integrated circuits and microcomponents
作者: Singleton, L Detemple, P Inst Mikrotech Mainz GmbH D-55129 Mainz Germany
masks for LIGA applications requiring deep X-ray lithography have different specifications compared to those masks used in microelectronic applications. Generally, deep X-ray LIGA applications require resist heights g... 详细信息
来源: 评论
Ion projection lithography - progress in mask and tool technology
Ion projection lithography - progress in mask and tool techn...
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16th european conference on mask technology for integrated circuits and microcomponents
作者: Ehrmann, A Kaesmaier, R Struck, T Infineon Technol D-81541 Munich Germany
Ion Projection Lithography is one of the major competitors for sub 100nm-lithography. Within the MEDEA ion projection lithography project and other activities related to it, new results in mask and tool technology hav... 详细信息
来源: 评论